Research Catalog

Wafer fabrication : factory performance and analysis

Title: Wafer fabrication : factory performance and analysis / Linda F. Atherton, Robert W. Atherton.
Author: Atherton, Linda F.
Publication: Boston : Kluwer Academic Publishers, c1995.

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Additional Authors

Atherton, Robert W.

Description

xix, 468 p. : ill.; 25 cm.

Series Statement

The Kluwer international series in engineering and computer science ; SECS 339. Microelectronics manufacturing

Uniform Title

Kluwer international series in engineering and computer science ; SECS 339.
Kluwer international series in engineering and computer science. Microelectronics manufacturing.

Subject

Bibliography (note)

Call Number

JSE 96-825

ISBN

0792396197 (alk. paper)

LCCN

95040381

OCLC

33079151

Author

Atherton, Linda F.

Title

Wafer fabrication : factory performance and analysis / Linda F. Atherton, Robert W. Atherton.

Imprint

Boston : Kluwer Academic Publishers, c1995.

Series

The Kluwer international series in engineering and computer science ; SECS 339. Microelectronics manufacturing

Kluwer international series in engineering and computer science ; SECS 339.

Kluwer international series in engineering and computer science. Microelectronics manufacturing.

Bibliography

Includes bibliographical references and index.

Indexed Term

Semiconductors

Added Author

Atherton, Robert W.

Research Call Number

JSE 96-825