Research Catalog
Rapid thermal processing of semiconductors
- Title
- Rapid thermal processing of semiconductors / Victor E. Borisenko, Peter J. Hesketh.
- Author
- Borisenko, V. E. (Viktor Evgenʹevich)
- Publication
- New York ; London : Plenum Press, c1997.
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| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | JSF 97-379 | Offsite |
Details
- Additional Authors
- Hesketh, P. J. (Peter J.)
- Description
- xxii, 358 p. : ill.; 26 cm.
- Series Statement
- Microdevices
- Subject
- Bibliography (note)
- Includes bibliographical references (p. 301-353) and index.
- Call Number
- JSF 97-379
- ISBN
- 0306450542
- LCCN
- 97003783
- OCLC
- 36327442
- vendor97003783
- Author
- Borisenko, V. E. (Viktor Evgenʹevich)
- Title
- Rapid thermal processing of semiconductors / Victor E. Borisenko, Peter J. Hesketh.
- Imprint
- New York ; London : Plenum Press, c1997.
- Series
- Microdevices
- Bibliography
- Includes bibliographical references (p. 301-353) and index.
- Added Author
- Hesketh, P. J. (Peter J.)
- Research Call Number
- JSF 97-379