Research Catalog

Semiconductor technology : processing and novel fabrication techniques

Title
Semiconductor technology : processing and novel fabrication techniques / edited by Mikhail E. Levinshtein, Michael S. Shur.
Publication
New York ; Chichester, [England] : John Wiley & Sons, c1997.

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Details

Additional Authors
  • Levinshteĭn, M. E. (Mikhail Efimovich)
  • Shur, Michael.
Description
xviii, 240 p. : ill.; 24 cm.
Subjects
Note
  • "A Wiley-Interscience publication."
Bibliography (note)
  • Includes bibliographical references and index.
Call Number
JSE 97-1464
ISBN
0471127922 (cloth : alk. paper)
LCCN
97001734
OCLC
  • 36327317
  • vendor97001734
Title
Semiconductor technology : processing and novel fabrication techniques / edited by Mikhail E. Levinshtein, Michael S. Shur.
Imprint
New York ; Chichester, [England] : John Wiley & Sons, c1997.
Bibliography
Includes bibliographical references and index.
Added Author
Levinshteĭn, M. E. (Mikhail Efimovich)
Shur, Michael.
Research Call Number
JSE 97-1464
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