Research Catalog
Fundamentals of microfabrication
- Title
- Fundamentals of microfabrication / Marc Madou.
- Author
- Madou, Marc J.
- Publication
- Boca Raton, Fla. : CRC Press, c1997.
Items in the Library & Off-site
Filter by
1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | JSF 98-99 | Offsite |
Details
- Description
- 589 p., [22] p. of plates : ill. (some col.); 29 cm.
- Subjects
- Bibliography (note)
- Includes bibliographical references (p. 565-569) and index.
- Call Number
- JSF 98-99
- ISBN
- 0849394511 (acid-free paper)
- LCCN
- 96043344
- OCLC
- 35397909
- Author
- Madou, Marc J.
- Title
- Fundamentals of microfabrication / Marc Madou.
- Imprint
- Boca Raton, Fla. : CRC Press, c1997.
- Bibliography
- Includes bibliographical references (p. 565-569) and index.
- Research Call Number
- JSF 98-99