Research Catalog

Stress-induced phenomena in metallization : Fourth International Workshop, Tokyo, Japan, June, 1997

Title: Stress-induced phenomena in metallization : Fourth International Workshop, Tokyo, Japan, June, 1997 / editors, Hidekazu Okabayashi, Shoso Shingubara, Paul S. Ho.
Publication: Woodbury, N.Y. : AIP Press, c1998.

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Details

Additional Authors

Description

ixi, 519 p. : ill.; 25 cm.

Series Statement

AIP conference proceedings ; 418

Subjects

Metallic films > Congresses
Semiconductors > Defects > Congresses
Thin film devices > Defects > Congresses
Aluminum films > Congresses

Note

"DOE CONF-976190"--T.p. verso.

Bibliography (note)

Includes bibliographical references and author index.

Call Number

JSE 98-793

ISBN

1563966824

LCCN

97077868

OCLC

38918611

Title

Stress-induced phenomena in metallization : Fourth International Workshop, Tokyo, Japan, June, 1997 / editors, Hidekazu Okabayashi, Shoso Shingubara, Paul S. Ho.

Imprint

Woodbury, N.Y. : AIP Press, c1998.

Series

AIP conference proceedings ; 418

Bibliography

Includes bibliographical references and author index.

Added Author

Okabayashi, Hidekazu.

Shingubara, Shoso.

Ho, P. S.

Research Call Number

JSE 98-793

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