Research Catalog
Semiconductor micromachining
- Title
- Semiconductor micromachining / edited by S.A. Campbell, H.J. Lewerenz.
- Publication
- Chichester, England ; New York : Wiley, c1998.
Items in the Library & Off-site
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2 Items
| Status | Vol/Date | Format | Access | Call Number | Item Location |
|---|---|---|---|---|---|
| v. 2 | Text | Request in advance | JSE 98-986 v. 2 | Offsite | |
| v. 1 | Text | Request in advance | JSE 98-986 v. 1 | Offsite |
Details
- Additional Authors
- Description
- 2 v. : ill.; 24 cm.
- Subject
- Bibliography (note)
- Includes bibliographical references and indexes.
- Contents
- v. 1. Fundamental electrochemistry and physics -- v. 2. Techniques and industrial applications.
- Call Number
- JSE 98-986
- ISBN
- 0471966819 (v. 1 : alk. paper)
- 0471966827 (v. 2 : alk. paper)
- 0471980846 (set)
- LCCN
- 97026052
- OCLC
- 37180970
- Title
- Semiconductor micromachining / edited by S.A. Campbell, H.J. Lewerenz.
- Imprint
- Chichester, England ; New York : Wiley, c1998.
- Bibliography
- Includes bibliographical references and indexes.
- Added Author
- Campbell, S. A.Lewerenz, H.- J.
- Research Call Number
- JSE 98-986