Research Catalog
Microlithography world.
- Title
- Microlithography world.
- Publication
- Port Washington, N.Y. : Penn Well Publication, published in cooperation with SPIE, 1992-
Items in the Library & Off-site
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2 Items
| Status | Vol/Date | Format | Access | Call Number | Item Location |
|---|---|---|---|---|---|
| v. 7-17, inc. (1998-2008) | Text | Request in advance | JSM 98-51 v. 7-17, inc. (1998-2008) | Offsite | |
| v. 6, no. 1 (Win 1997) | Text | Request in advance | JSM 98-51 v. 6, no. 1 (Win 1997) | Offsite |
Holdings
- Location
- Schwarzman Building - Main Reading Room 315
- Call Number
- JSM 98-51
- Notes
- Ceased with 2008.
Details
- Additional Authors
- Society of Photo-Optical Instrumentation Engineers.
- Publication Date
- Vol. 1, no. 1 (Mar./Apr. 1992)-
- Description
- v. : ill.; 28 cm.
- Alternative Title
- Microlithogr. world
- Microlithography world
- Subjects
- Note
- Title from cover.
- Published: Tulsa, OK, Oct., Nov., Dec. 1993- .
- Call Number
- JSM 98-51
- ISSN
- 1074-407X
- LCCN
- 93659127
- OCLC
- 28982886
- Title
- Microlithography world.
- Imprint
- Port Washington, N.Y. : Penn Well Publication, published in cooperation with SPIE, 1992-
- Current Frequency
- Quarterly, Jan./Feb./Mar. 1993-
- Former Frequency
- Bimonthly, Mar./Apr. 1992-<Sept./Oct. 1992>
- Added Author
- Society of Photo-Optical Instrumentation Engineers.
- Abbreviated Title
- Microlithogr. world
- Research Call Number
- JSM 98-51