Research Catalog

Laser-assisted microtechnology

Title
Laser-assisted microtechnology / Simeon M. Metev, Vadim P. Veiko.
Author
Metev, S. M. (Simeon Metodiev)
Publication
Berlin ; New York : Springer, c1998.

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Details

Additional Authors
Veĭko, V. P. (Vadim Pavlovich)
Description
xii, 270 p. : ill.; 25 cm.
Series Statement
Springer series in materials science, 0933-033X ; 19
Uniform Title
Springer series in materials science ; v. 19.
Subject
  • Electronic industries > Technological innovations
  • Lasers > Industrial applications
  • Manufacturing processes
  • Micromachining
  • Thin film devices > Design and construction
Bibliography (note)
  • Includes bibliographical references and index.
Call Number
JSE 98-1241
ISBN
354063973X (hardcover : alk. paper)
LCCN
98026049
OCLC
39229749
Author
Metev, S. M. (Simeon Metodiev)
Title
Laser-assisted microtechnology / Simeon M. Metev, Vadim P. Veiko.
Imprint
Berlin ; New York : Springer, c1998.
Edition
2nd, updated ed.
Series
Springer series in materials science, 0933-033X ; 19
Springer series in materials science ; v. 19.
Bibliography
Includes bibliographical references and index.
Added Author
Veĭko, V. P. (Vadim Pavlovich)
Research Call Number
JSE 98-1241
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