Research Catalog

Handbook of physical vapor deposition (PVD) processing : film formation, adhesion, surface preparation and contamination control

Title: Handbook of physical vapor deposition (PVD) processing : film formation, adhesion, surface preparation and contamination control / by Donald M. Mattox.
Author: Mattox, D. M.
Publication: Westwood, N.J. : Noyes Publications, c1998.

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Details

Description

xxvii, 917 p. : ill.; 25 cm.

Subject

Vapor-plating > Handbooks, manuals, etc

Bibliography (note)

Includes bibliographical references and indexes.

Call Number

JSE 98-1335

ISBN

0815514220

LCCN

97044664

OCLC

vendor

Author

Mattox, D. M.

Title

Handbook of physical vapor deposition (PVD) processing : film formation, adhesion, surface preparation and contamination control / by Donald M. Mattox.

Imprint

Westwood, N.J. : Noyes Publications, c1998.

Bibliography

Includes bibliographical references and indexes.

Research Call Number

JSE 98-1335

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