Research Catalog
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.
- Title
- Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A. / editors, Shyam P. Murarka ... [et al.].
- Publication
- Warrendale, Pa. : Materials Research Society, c1998.
Items in the Library & Off-site
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | JSE 99-919 | Offsite |
Details
- Additional Authors
- Murarka, S. P.
- Description
- xvi, 560 p. : ill.; 24 cm.
- Series Statement
- Materials Research Society symposium proceedings ; v. 514
- Uniform Title
- Materials Research Society symposia proceedings ; v. 514.
- Subjects
- Bibliography (note)
- Includes bibliographical references and indexes.
- Call Number
- JSE 99-919
- ISBN
- 1558994203
- LCCN
- 98039943
- OCLC
- 39655352
- Title
- Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A. / editors, Shyam P. Murarka ... [et al.].
- Imprint
- Warrendale, Pa. : Materials Research Society, c1998.
- Series
- Materials Research Society symposium proceedings ; v. 514Materials Research Society symposia proceedings ; v. 514.
- Bibliography
- Includes bibliographical references and indexes.
- Added Author
- Murarka, S. P.
- Research Call Number
- JSE 99-919