Research Catalog

Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.

Title
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A. / editors, Shyam P. Murarka ... [et al.].
Publication
Warrendale, Pa. : Materials Research Society, c1998.

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Details

Additional Authors
Murarka, S. P.
Description
xvi, 560 p. : ill.; 24 cm.
Series Statement
Materials Research Society symposium proceedings ; v. 514
Uniform Title
Materials Research Society symposia proceedings ; v. 514.
Subjects
Bibliography (note)
  • Includes bibliographical references and indexes.
Call Number
JSE 99-919
ISBN
1558994203
LCCN
98039943
OCLC
39655352
Title
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A. / editors, Shyam P. Murarka ... [et al.].
Imprint
Warrendale, Pa. : Materials Research Society, c1998.
Series
Materials Research Society symposium proceedings ; v. 514
Materials Research Society symposia proceedings ; v. 514.
Bibliography
Includes bibliographical references and indexes.
Added Author
Murarka, S. P.
Research Call Number
JSE 99-919
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