Research Catalog

Microlithography : science and technology

Title
Microlithography : science and technology / edited by James R. Sheats, Bruce W. Smith.
Publication
New York : Marcel Dekker, c1998.

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Details

Additional Authors
  • Sheats, James R., 1948-
  • Smith, Bruce W., 1959-
Description
xii, 780 p. : ill.; 24 cm.
Subject
  • Microlithography > Industrial applications
  • Integrated circuits > Masks
  • Metal oxide semiconductors, Complementary > Design and construction
  • Manufacturing processes
Bibliography (note)
  • Includes bibliographical references and index.
Call Number
JSE 99-1434
ISBN
0824799534 (alk. paper)
LCCN
98016713
OCLC
38765112
Title
Microlithography : science and technology / edited by James R. Sheats, Bruce W. Smith.
Imprint
New York : Marcel Dekker, c1998.
Bibliography
Includes bibliographical references and index.
Added Author
Sheats, James R., 1948-
Smith, Bruce W., 1959-
Research Call Number
JSE 99-1434
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