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Stress induced phenomena in metallization : fifth international workshop, Stuttgart, Germany, June, 1999

Title
Stress induced phenomena in metallization : fifth international workshop, Stuttgart, Germany, June, 1999 / editors, Oliver Kraft, Eduard Arzt, Cynthia A. Volkert.
Publication
Woodbury, N.Y. : American Institute of Physics, c1999.

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Details

Additional Authors
International Workshop on Stress-Induced Phenomena in Metallization (5th : 1999 : Stuttgart, Germany)
Description
ix, 318 p. : ill.; 25 cm.
Series Statement
AIP conference proceedings ; 491
Uniform Title
AIP conference proceedings ; no. 491.
Subject
  • Integrated circuits > Defects > Congresses
  • Thin film devices > Defects > Congresses
  • Electrodiffusion > Congresses
  • Metallic films > Congresses
  • Electrochemical metallizing > Congresses
  • Aluminum films > Congresses
  • Semiconductors > Defects > Congresses
  • Liquid crystal devices > Defects > Congresses
  • Acoustic surface wave devices > Defects > Congresses
Bibliography (note)
  • Includes bibliographical references.
Call Number
JSE 99-2270
ISBN
1563969041
LCCN
99460336
OCLC
42866326
Title
Stress induced phenomena in metallization : fifth international workshop, Stuttgart, Germany, June, 1999 / editors, Oliver Kraft, Eduard Arzt, Cynthia A. Volkert.
Imprint
Woodbury, N.Y. : American Institute of Physics, c1999.
Series
AIP conference proceedings ; 491
AIP conference proceedings ; no. 491.
Bibliography
Includes bibliographical references.
Added Author
International Workshop on Stress-Induced Phenomena in Metallization (5th : 1999 : Stuttgart, Germany)
Research Call Number
JSE 99-2270
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