Research Catalog

Si front-end processing : physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.

Title
Si front-end processing : physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A. / editors, Hans-Joachim L. Gossmann ... [et al.].
Publication
Warrendale, Penn. : Materials Research Society, c1999.

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Details

Additional Authors
Gossmann, Hans-Joachim L.
Description
xi, 298 p. : ill.; 24 cm.
Series Statement
Materials Research Society symposium proceedings ; v. 568
Uniform Title
Materials Research Society symposia proceedings ; v. 568.
Subject
  • Semiconductors > Design and construction > Congresses
  • Semiconductor doping > Congresses
  • Silicon > Congresses
  • Semiconductors > Defects > Congresses
Bibliography (note)
  • Includes bibliographical references and index.
Call Number
JSE 00-1431
ISBN
1558994750
LCCN
99016530
OCLC
41612296
Title
Si front-end processing : physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A. / editors, Hans-Joachim L. Gossmann ... [et al.].
Imprint
Warrendale, Penn. : Materials Research Society, c1999.
Series
Materials Research Society symposium proceedings ; v. 568
Materials Research Society symposia proceedings ; v. 568.
Bibliography
Includes bibliographical references and index.
Added Author
Gossmann, Hans-Joachim L.
Research Call Number
JSE 00-1431
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