Research Catalog

Handbook of chemical vapor depos[i]tion (CVD) : principles, technology, and applications

Title
Handbook of chemical vapor depos[i]tion (CVD) : principles, technology, and applications / by Hugh O. Pierson.
Author
Pierson, Hugh O.
Publication
Norwich, N.Y : Noyes Publications/William Andrew Pub., c1999.

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Details

Description
xxiv, 482 p. : ill.; 25 cm.
Series Statement
Materials science and process technology series
Subjects
Note
  • Rev. ed. of: Handbook of chemical vapor deposition (CVD), c1992.
Bibliography (note)
  • Includes bibliographical references and index.
Call Number
JSE 00-1032
ISBN
0815514328
LCCN
99026065
OCLC
vendor
Author
Pierson, Hugh O.
Title
Handbook of chemical vapor depos[i]tion (CVD) : principles, technology, and applications / by Hugh O. Pierson.
Imprint
Norwich, N.Y : Noyes Publications/William Andrew Pub., c1999.
Edition
2nd ed.
Series
Materials science and process technology series
Bibliography
Includes bibliographical references and index.
Added Author
Pierson, Hugh O. Handbook of chemical vapor deposition (CVD)
Research Call Number
JSE 00-1032
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