Research Catalog

Nano- and microelectromechanical systems : fundamentals of nano- and microengineering

Title
Nano- and microelectromechanical systems : fundamentals of nano- and microengineering / Sergey Edward Lyshevski.
Author
Lyshevski, Sergey Edward.
Publication
Boca Raton, Fla. : CRC Press, c2001.

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Details

Description
338 p. : ill.; 25 cm.
Series Statement
Nano- and microscience, engineering, technology, and medicine series
Subject
Bibliography (note)
  • Includes bibliographical references and index.
Contents
Nano- and microengineering, and nano- and microtechnologies -- Mathematical models and design of nano- and microelectromechanical systems -- Structural design, modeling, and simulation -- Control of nano- and microelectromechanical systems.
Call Number
JSE 01-569
ISBN
0849309166 (alk. paper)
LCCN
00057953
OCLC
44541881
Author
Lyshevski, Sergey Edward.
Title
Nano- and microelectromechanical systems : fundamentals of nano- and microengineering / Sergey Edward Lyshevski.
Imprint
Boca Raton, Fla. : CRC Press, c2001.
Series
Nano- and microscience, engineering, technology, and medicine series
Bibliography
Includes bibliographical references and index.
Research Call Number
JSE 01-569
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