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Techniques and challenges for 300 mm silicon : processing, characterization, modelling and equipment : proceedings of Symposium F on Techniques and Challenges for 300 mm Silicon of the E-MRS 1998 Spring Conference, Strasbourg, France, 16-19 June 1998

Title: Techniques and challenges for 300 mm silicon : processing, characterization, modelling and equipment : proceedings of Symposium F on Techniques and Challenges for 300 mm Silicon of the E-MRS 1998 Spring Conference, Strasbourg, France, 16-19 June 1998 / edited by H. Richter, P. Wagner, G. Ritter.
Author: Symposium F on Techniques and Challenges for 300 mm Silicon (1998 : Strasbourg, France)
Publication: Amsterdam ; New York : Elsevier, 1999.

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Details

Additional Authors

Description

vi, 85-297 p. : ill.; 29 cm.

Series Statement

European Materials Research Society symposia proceedings ; vol. 81

Uniform Title

European Materials Research Society symposia proceedings ; v. 81.

Alternative Title

Techniques and challenges for three hundred mm silicon

Subject

Semiconductor wafers > Congresses

Note

"Reprinted from Microelectronic engineering, vol. 45/2-3"--T.p. verso.

Bibliography (note)

Includes bibliographical references.

Call Number

JSF 01-893

ISBN

0080436099 (acid free paper)

LCCN

00266835

OCLC

46812078

Conference

Symposium F on Techniques and Challenges for 300 mm Silicon (1998 : Strasbourg, France)

Title

Techniques and challenges for 300 mm silicon : processing, characterization, modelling and equipment : proceedings of Symposium F on Techniques and Challenges for 300 mm Silicon of the E-MRS 1998 Spring Conference, Strasbourg, France, 16-19 June 1998 / edited by H. Richter, P. Wagner, G. Ritter.

Imprint

Amsterdam ; New York : Elsevier, 1999.

Series

European Materials Research Society symposia proceedings ; vol. 81

European Materials Research Society symposia proceedings ; v. 81.

Bibliography

Includes bibliographical references.

Added Author

Richter, H., 1940-

Wagner, P.

Ritter, G.

European Materials Research Society. Meeting (1998 : Strasbourg, France)

Research Call Number

JSF 01-893

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