- Additional Authors
- Description
- 1 v.
- Series Statement
- NASA technical memorandum ; 102001
- Subjects
- Note
- Distributed to depository libraries in microfiche.
- Reproduction (note)
- Call Number
- READEX Microfiche NAS 1.15:102001
- OCLC
- marcive24609106
- Title
Convection and chemistry effects in CVD, a 3-D analysis for silicon deposition [microform] / S.A. Gokoglu ... [et al.].
- Imprint
[Washington, DC] : National Aeronautics and Space Administration ; [Springfield, Va. : For sale by the National Technical Information Service, 1989]
- Series
NASA technical memorandum ; 102001
- Reproduction
Microfiche. [Washington, D.C.? : National Aeronautics and Space Administration], 1989. 1 microfiche.
- Added Author
Gokoglu, S. A.
United States. National Aeronautics and Space Administration.
- Gpo Item No.
830-D (MF)
- Sudoc No.
NAS 1.15:102001
- Research Call Number
READEX Microfiche NAS 1.15:102001