Research Catalog

Convection and chemistry effects in CVD, a 3-D analysis for silicon deposition

Title
Convection and chemistry effects in CVD, a 3-D analysis for silicon deposition [microform] / S.A. Gokoglu ... [et al.].
Publication
[Washington, DC] : National Aeronautics and Space Administration ; [Springfield, Va. : For sale by the National Technical Information Service, 1989]

Details

Additional Authors
  • Gokoglu, S. A.
  • United States. National Aeronautics and Space Administration.
Description
1 v.
Series Statement
NASA technical memorandum ; 102001
Subjects
Note
  • Distributed to depository libraries in microfiche.
Reproduction (note)
  • Microfiche.
Call Number
READEX Microfiche NAS 1.15:102001
OCLC
marcive24609106
Title
Convection and chemistry effects in CVD, a 3-D analysis for silicon deposition [microform] / S.A. Gokoglu ... [et al.].
Imprint
[Washington, DC] : National Aeronautics and Space Administration ; [Springfield, Va. : For sale by the National Technical Information Service, 1989]
Series
NASA technical memorandum ; 102001
Reproduction
Microfiche. [Washington, D.C.? : National Aeronautics and Space Administration], 1989. 1 microfiche.
Added Author
Gokoglu, S. A.
United States. National Aeronautics and Space Administration.
Gpo Item No.
830-D (MF)
Sudoc No.
NAS 1.15:102001
Research Call Number
READEX Microfiche NAS 1.15:102001
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