- Additional Authors
- United States. National Aeronautics and Space Administration.
- Description
- 1 v.
- Series Statement
- NASA technical memorandum ; NASA TM-88450
- Uniform Title
- NASA technical memorandum ; 88450.
- Subject
- Plasma-enhanced chemical vapor deposition
- Note
- Distributed to depository libraries in microfiche.
- Reproduction (note)
- Call Number
- READEX Microfiche NAS 1.15:88450
- OCLC
- marcive25224760
- Author
Okamoto, S.
- Title
An overview of CVD processes [microform] / S. Okamoto.
- Imprint
Washington DC : National Aeronautics and Space Administration, [1986]
- Series
NASA technical memorandum ; NASA TM-88450
NASA technical memorandum ; 88450.
- Reproduction
Microfiche. [Washington, D.C.? : National Aeronautics and Space Administration], 1987. 1 microfiche.
- Added Author
United States. National Aeronautics and Space Administration.
- Gpo Item No.
830-D (MF)
- Sudoc No.
NAS 1.15:88450
- Research Call Number
READEX Microfiche NAS 1.15:88450