Research Catalog

Numerical modeling tools for chemical vapor deposition

Title
Numerical modeling tools for chemical vapor deposition [microform] / Thomas J. Jasinski and Edward P. Childs.
Author
Jasinski, Thomas John.
Publication
[Washington, D.C.] : National Aeronautics and Space Administration, Office of Management, Scientific and Technical Information Program ; [Springfield, Va. : National Technical Information Service, distributor], 1992.

Details

Additional Authors
United States. National Aeronautics and Space Administration. Scientific and Technical Information Program.
Description
1 v.
Series Statement
NASA contractor report ; 4480
Uniform Title
NASA contractor report ; NASA CR-4480.
Subject
  • Plasma-enhanced chemical vapor deposition
  • Fluid dynamics
Note
  • Distributed to depository libraries in microfiche.
  • Shipping list no.: 93-0425-M.
Reproduction (note)
  • Microfiche.
Call Number
READEX Microfiche NAS 1.26:4480
OCLC
marcive28691764
Author
Jasinski, Thomas John.
Title
Numerical modeling tools for chemical vapor deposition [microform] / Thomas J. Jasinski and Edward P. Childs.
Imprint
[Washington, D.C.] : National Aeronautics and Space Administration, Office of Management, Scientific and Technical Information Program ; [Springfield, Va. : National Technical Information Service, distributor], 1992.
Series
NASA contractor report ; 4480
NASA contractor report ; NASA CR-4480.
Reproduction
Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1993] 2 microfiches.
Added Author
United States. National Aeronautics and Space Administration. Scientific and Technical Information Program.
Gpo Item No.
0830-H-14 (MF)
Sudoc No.
NAS 1.26:4480
Research Call Number
READEX Microfiche NAS 1.26:4480
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