Research Catalog

Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems

Title
Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems [microform] / Carol F. Vezzetti, Ruth N. Varner, James E. Potzick.
Author
Vezzetti, Carol F.
Publication
Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology ; [Springfield, VA : Order from National Technical Information Service], 1992.

Details

Additional Authors
  • Varner, Ruth N.
  • Potzick, James E.
  • National Institute of Standards and Technology (U.S.)
Description
xi, 37 p. : ill.; 28 cm.
Series Statement
  • Standard reference materials
  • NIST special publication ; 260-117
Alternative Title
Antireflecting chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems.
Subject
  • Integrated circuits > Calibration > Standards
  • Microscopy > Calibration > Standards
  • Microscopes > Calibration > Standards
  • Optical measurements > Standards
Note
  • Distributed to depository libraries in microfiche.
  • Shipping list no.: 92-2096-M.
  • Paper version no longer for sale by the Supt. of Docs.
  • "Issued January 1992."
Bibliography (note)
  • Includes bibliographical references.
Type of Report (note)
  • Final.
Reproduction (note)
  • Microfiche.
Call Number
READEX Microfiche C 13.10:260-117
OCLC
marcive29206275
Author
Vezzetti, Carol F.
Title
Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems [microform] / Carol F. Vezzetti, Ruth N. Varner, James E. Potzick.
Imprint
Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology ; [Springfield, VA : Order from National Technical Information Service], 1992.
Series
Standard reference materials
NIST special publication ; 260-117
Type Of Report
Final.
Bibliography
Includes bibliographical references.
Reproduction
Microfiche. [Washington, D.C.?] : Supt. of Docs., U.S. G.P.O., [1992] 1 microfiche : negative.
Added Author
Varner, Ruth N.
Potzick, James E.
National Institute of Standards and Technology (U.S.)
Other Form:
original (OCoLC) 27648137
Gpo Item No.
0247 (MF)
Sudoc No.
C 13.10:260-117
Research Call Number
READEX Microfiche C 13.10:260-117
View in Legacy Catalog