Research Catalog

Investigation of silicon surface passivation by silicon nitride film deposition annual report, 9/1/83 - 8/31/84, JPL contract no. 956614

Title: Investigation of silicon surface passivation by silicon nitride film deposition [microform] : annual report, 9/1/83 - 8/31/84, JPL contract no. 956614 / by Larry C. Olsen.
Author: Olsen, Larry C. (Larry Carrol), 1937-2020.
Publication: Richland, Wash. : Joint Center for Graduate Study, University of Washington ; [Washington, D.C.? : National Aeronautics and Space Administration ; Springfield, Va. : National Technical Information Service, distributor, 1984]

Details

Additional Authors

United States. National Aeronautics and Space Administration.

Description

1 v.

Series Statement

NASA contractor report ; 175693
NAS contractor report ; 175693

Subject

Silicon nitride

Note

Distributed to depository libraries in microfiche.

Reproduction (note)

Microfiche.

Call Number

READEX Microfiche NAS 1.26:175693

OCLC

marcive30607787

Author

Olsen, Larry C. (Larry Carrol), 1937-2020.

Title

Investigation of silicon surface passivation by silicon nitride film deposition [microform] : annual report, 9/1/83 - 8/31/84, JPL contract no. 956614 / by Larry C. Olsen.

Imprint

Richland, Wash. : Joint Center for Graduate Study, University of Washington ; [Washington, D.C.? : National Aeronautics and Space Administration ; Springfield, Va. : National Technical Information Service, distributor, 1984]

Series

NASA contractor report ; 175693

NAS contractor report ; 175693

Reproduction

Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1984] 1 microfiche.

Added Author

United States. National Aeronautics and Space Administration.

Gpo Item No.

0830-H-14 (MF)

Sudoc No.

NAS 1.26:175693

Research Call Number

READEX Microfiche NAS 1.26:175693

View in Legacy Catalog