Research Catalog

Title

User's manual for the program MONSEL-1 [microform] : Monte Carlo simulation of SEM signals for linewidth metrology / Jeremiah R. Lowney and Egon Marx.

Author

Lowney, J. R. (Jeremiah Ralph), 1946-

Publication

Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; Washington, DC : For sale by the Supt. of Docs., U.S. G.P.O., 1994.

Details

Additional Authors

• Marx, Egon.
• National Institute of Standards and Technology (U.S.)

Description

iv, 39 p. : ill.; 28 cm.

Series Statement

• Semiconductor measurement technology
• NIST special publication ; 400-95

Subject

• Scanning electron microscopy > Computer programs > Handbooks, manuals, etc
• Electrons > Scattering > Mathematical models > Computer programs > Handbooks, manuals, etc
• Monte Carlo method > Computer programs > Handbooks, manuals, etc

Note

• Distributed to depository libraries in microfiche.
• Shipping list no.: 94-0956-M.
• "August 1994."

Bibliography (note)

• Includes bibliographical references.

Reproduction (note)

• Microfiche.

Call Number

READEX Microfiche C 13.10:400-95

OCLC

marcive31921202

Author

Lowney, J. R. (Jeremiah Ralph), 1946-

Title

User's manual for the program MONSEL-1 [microform] : Monte Carlo simulation of SEM signals for linewidth metrology / Jeremiah R. Lowney and Egon Marx.

Imprint

Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; Washington, DC : For sale by the Supt. of Docs., U.S. G.P.O., 1994.

Series

Semiconductor measurement technology

NIST special publication ; 400-95

Bibliography

Includes bibliographical references.

Reproduction

Microfiche. [Washington, D.C.?] : Supt. of Docs., U.S. G.P.O., [1994] 1 microfiche : negative.

Added Author

Marx, Egon.

National Institute of Standards and Technology (U.S.)

Gpo Item No.

0247 (MF)

Sudoc No.

C 13.10:400-95

Research Call Number

READEX Microfiche C 13.10:400-95