Research Catalog

[Sputter process investigation] final technical report

Title: [Sputter process investigation] [microform] : [material and environment interaction processes investigation] : final technical report / John R. Williams, Michael J. Bozack, and Albert T. Fromhold.
Author: Williams, John R.
Publication: [Washington, DC : National Aeronautics and Space Administration ; Springfield, Va. : National Technical Information Service, distributor, 1994]

Details

Additional Authors

Description

1 v.

Series Statement

NASA contractor report ; NASA CR-193946

Subject

Note

Distributed to depository libraries in microfiche.
Shipping list no.: 94-0859-M.

Reproduction (note)

Microfiche.

Call Number

READEX Microfiche NAS 1.26:193946

OCLC

marcive32027170

Author

Williams, John R.

Title

[Sputter process investigation] [microform] : [material and environment interaction processes investigation] : final technical report / John R. Williams, Michael J. Bozack, and Albert T. Fromhold.

Imprint

[Washington, DC : National Aeronautics and Space Administration ; Springfield, Va. : National Technical Information Service, distributor, 1994]

Series

NASA contractor report ; NASA CR-193946

Reproduction

Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1994] 1 microfiche.

Added Author

Bozack, Michael J.

Fromhold, A. T.

United States. National Aeronautics and Space Administration.

Gpo Item No.

0830-H-14 (MF)

Sudoc No.

NAS 1.26:193946

Research Call Number

READEX Microfiche NAS 1.26:193946

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