Research Catalog

Adhesion, friction, and wear of plasma-deposited thin silicon nitride films at temperatures to 700⁰C

Title
Adhesion, friction, and wear of plasma-deposited thin silicon nitride films at temperatures to 700⁰C [microform] / K. Miyoshi ... [et al.].
Publication
Cleveland, Ohio : Lewis Research Center, NASA ; [Springfield, Va. : National Technical Information Service, distributor, 1989]

Details

Additional Authors
  • Miyoshi, Kazuhisa.
  • Lewis Research Center.
  • American Society of Mechanical Engineers.
  • International Conference on Wear of Materials (1989 : Denver, Colo.)
Description
1 v.
Series Statement
NASA technical memorandum ; 101377
Subject
  • Adhesion
  • Deposition
  • Friction
  • Silicon nitrides
  • Temperature effects
  • Thin films
  • Wear
Note
  • "International Conference on Wear of Materials sponsored by the American Society of Mechanical Engineers, Denver, Colorado, April 9-13, 1989."
  • Distributed to depository libraries in microfiche.
Reproduction (note)
  • Microfiche.
Call Number
READEX Microfiche NAS 1.15:101377
OCLC
marcive32650936
Title
Adhesion, friction, and wear of plasma-deposited thin silicon nitride films at temperatures to 700⁰C [microform] / K. Miyoshi ... [et al.].
Imprint
Cleveland, Ohio : Lewis Research Center, NASA ; [Springfield, Va. : National Technical Information Service, distributor, 1989]
Series
NASA technical memorandum ; 101377
Reproduction
Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1989] 1 microfiche.
Added Author
Miyoshi, Kazuhisa.
Lewis Research Center.
American Society of Mechanical Engineers.
International Conference on Wear of Materials (1989 : Denver, Colo.)
Gpo Item No.
0830-D (MF)
Sudoc No.
NAS 1.15:101377
Research Call Number
READEX Microfiche NAS 1.15:101377
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