- Additional Authors
- Description
- 1 v.
- Series Statement
- NASA technical memorandum ; 106761
- Alternative Title
- Surface passivation for 3-5 semiconductor processing
- Subject
- Note
- Distributed to depository libraries in microfiche.
- Shipping list no.: 95-0275-M.
- Reproduction (note)
- Call Number
- READEX Microfiche NAS 1.15:106761
- OCLC
- marcive32712365
- Title
Surface passivation for III-V semiconductor processing [microform] : stable gallium sulphide films by MOCVD / Andrew N. MacInnes ... [et al.].
- Imprint
[Washington, D.C.] : National Aeronautics and Space Administration ; [Springfield, Va. : National Technical Information Service, distributor, 1994]
- Series
NASA technical memorandum ; 106761
- Reproduction
Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1994] 1 microfiche.
- Added Author
MacInnes, Andrew N.
United States. National Aeronautics and Space Administration.
- Gpo Item No.
0830-D (MF)
- Sudoc No.
NAS 1.15:106761
- Research Call Number
READEX Microfiche NAS 1.15:106761