Research Catalog

Title

Method for anisotropic etching in the manufacture of semiconductor devices [microform] / inventors, Steven Koontz and Jon Cross.

Publication

[Washington, DC : National Aeronautics and Space Administration ; Springfield, Va. : National Technical Information Service, distributor, 1991]

Details

Additional Authors

• Koontz, Steven.
• Cross, Jon.
• United States. National Aeronautics and Space Administration.

Description

1 v.

Series Statement

NASA case ; no. MSC-21631-1

Uniform Title

NASA case ; MSC-21631-1.

Subject

• Anisotropy
• Etching
• Microelectronics
• Oxygen atoms
• Semiconductor devices

Note

• Distributed to depository libraries in microfiche.
• Shipping list no.: 92-0705-M.

Reproduction (note)

• Microfiche.

Call Number

READEX Microfiche NAS 1.71:MSC-21631-1

OCLC

marcive32943412

Title

Method for anisotropic etching in the manufacture of semiconductor devices [microform] / inventors, Steven Koontz and Jon Cross.

Imprint

[Washington, DC : National Aeronautics and Space Administration ; Springfield, Va. : National Technical Information Service, distributor, 1991]

Series

NASA case ; no. MSC-21631-1

NASA case ; MSC-21631-1.

Reproduction

Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1991] 1 microfiche.

Added Author

Koontz, Steven.

Cross, Jon.

United States. National Aeronautics and Space Administration.

Gpo Item No.

0830-J-10 (MF)

Sudoc No.

NAS 1.71:MSC-21631-1

Research Call Number

READEX Microfiche NAS 1.71:MSC-21631-1