Research Catalog

Preferentially etched epitaxial liftoff of InP material

Title
Preferentially etched epitaxial liftoff of InP material [microform] / inventor (s), Sheila G. Bailey, David M. Wilt, Frank L. DeAngelo.
Publication
[Washington, DC : National Aeronautics and Space Administration ; Springfield, Va. : National Technical Information Service, distributor, 1995]

Details

Additional Authors
  • Bailey, Sheila G.
  • Wilt, David M.
  • DeAngelo, Frank L.
  • United States. National Aeronautics and Space Administration.
Description
1 v.
Series Statement
NASA case ; no. LEW-15, 760-1
Uniform Title
NASA case ; LEW-15760-1.
Subject
  • Epitaxy
  • Etching
  • Indium phosphides
  • Removal
  • Substrates
Note
  • Distributed to depository libraries in microfiche.
  • Shipping list no.: 95-0748-M.
Reproduction (note)
  • Microfiche.
Call Number
READEX Microfiche NAS 1.71:LEW-15760-1
OCLC
marcive33598482
Title
Preferentially etched epitaxial liftoff of InP material [microform] / inventor (s), Sheila G. Bailey, David M. Wilt, Frank L. DeAngelo.
Imprint
[Washington, DC : National Aeronautics and Space Administration ; Springfield, Va. : National Technical Information Service, distributor, 1995]
Series
NASA case ; no. LEW-15, 760-1
NASA case ; LEW-15760-1.
Reproduction
Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1995] 1 microfiche.
Added Author
Bailey, Sheila G.
Wilt, David M.
DeAngelo, Frank L.
United States. National Aeronautics and Space Administration.
Gpo Item No.
0830-J-10 (MF)
Sudoc No.
NAS 1.71:LEW-15760-1
Research Call Number
READEX Microfiche NAS 1.71:LEW-15760-1
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