Research Catalog

Title

The control of stoichiometry in epitaxial semiconductor structures [microform] : interfacial chemistry, property relations : a workshop reivew / by Klaus J. Bachmann.

Author

Bachmann, Klaus J.

Publication

[Washington, D.C. : National Aeronautics and Space Administration ; Springfield, Va. : National Technical Information Service, distributor, 1995]

Details

Additional Authors

United States. National Aeronautics and Space Administration.

Description

1 v.

Series Statement

NASA contractor report ; NASA CR-199716

Subject

• Crystal structure
• Epitaxy
• Semiconductor devices
• Semiconductors (Materials)
• Stoichiometry

Note

• Distributed to depository libraries in microfiche.
• Shipping list no.: 96-0197-M.

Reproduction (note)

• Microfiche.

Call Number

READEX Microfiche NAS 1.26:199716

OCLC

marcive34603104

Author

Bachmann, Klaus J.

Title

The control of stoichiometry in epitaxial semiconductor structures [microform] : interfacial chemistry, property relations : a workshop reivew / by Klaus J. Bachmann.

Imprint

[Washington, D.C. : National Aeronautics and Space Administration ; Springfield, Va. : National Technical Information Service, distributor, 1995]

Series

NASA contractor report ; NASA CR-199716

Reproduction

Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1995] 1 microfiche.

Added Author

United States. National Aeronautics and Space Administration.

Gpo Item No.

0830-H-14 (MF)

Sudoc No.

NAS 1.26:199716

Research Call Number

READEX Microfiche NAS 1.26:199716