Research Catalog

System for the growth of bulk SiC crystals by modified CVD techniques final report

Title
System for the growth of bulk SiC crystals by modified CVD techniques [microform] : final report / Andrew J. Steckl, principal investigator.
Author
Steckl, Andrew J.
Publication
[Washington, DC : National Aeronautics and Space Administration ; Springfield, Va. : National Technical Information Service, distributor, 1994]

Details

Additional Authors
United States. National Aeronautics and Space Administration.
Description
1 v.
Series Statement
NASA contractor report ; NASA CR-200136
Subject
  • Crystal growth
  • Crystal structure
  • Film thickness
  • Silicon carbides
  • Silicon films
  • Single crystals
  • Substrates
  • Thin films
  • Vapor deposition
Note
  • Distributed to depository libraries in microfiche.
  • Shipping list no.: 96-0513-M.
Reproduction (note)
  • Microfiche.
Call Number
READEX Microfiche NAS 1.26:200136
OCLC
marcive35306978
Author
Steckl, Andrew J.
Title
System for the growth of bulk SiC crystals by modified CVD techniques [microform] : final report / Andrew J. Steckl, principal investigator.
Imprint
[Washington, DC : National Aeronautics and Space Administration ; Springfield, Va. : National Technical Information Service, distributor, 1994]
Series
NASA contractor report ; NASA CR-200136
Reproduction
Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1996] 1 microfiche.
Added Author
United States. National Aeronautics and Space Administration.
Gpo Item No.
0830-H-14 (MF)
Sudoc No.
NAS 1.26:200136
Research Call Number
READEX Microfiche NAS 1.26:200136
View in Legacy Catalog