Research Catalog

Title

The certification of 100 mm diameter silicon resistivity SRMs 2541 through 2547 using dual-configuration four-point probe measurements [microform] / J.R. Ehrstein, M.C. Croarkin.

Author

Ehrstein, James R.

Publication

Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 1997.

Details

Additional Authors

• Croarkin, M. C. (Mary Carroll), 1934-
• National Institute of Standards and Technology (U.S.)

Description

xv, 84 p. : ill.; 28 cm.

Series Statement

• NIST special publication ; 260-131
• Standard reference materials

Alternative Title

Certification of one hundred mm diameter silicon resistivity SRMs ...

Subject

• Silicon
• Silicon > Electric properties

Note

• Shipping list no.: 98-0569-M.
• "August 1997."

Bibliography (note)

• Includes bibliographical references.

Reproduction (note)

• Microfiche.

Call Number

READEX Microfiche C 13.10:260-131

OCLC

marcive39138544

Author

Ehrstein, James R.

Title

The certification of 100 mm diameter silicon resistivity SRMs 2541 through 2547 using dual-configuration four-point probe measurements [microform] / J.R. Ehrstein, M.C. Croarkin.

Imprint

Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 1997.

Series

NIST special publication ; 260-131

Standard reference materials

Bibliography

Includes bibliographical references.

Reproduction

Microfiche. [Washington, D.C.] : Supt. of Docs., U.S. G.P.O., [1998] 2 microfiches : negative.

Added Author

Croarkin, M. C. (Mary Carroll), 1934-

National Institute of Standards and Technology (U.S.)

Gpo Item No.

0247 (MF)

Sudoc No.

C 13.10:260-131

Research Call Number

READEX Microfiche C 13.10:260-131