Research Catalog

Characterization of SiGe/Ge heterostructures and graded layers using variable angle spectroscopic ellipsometry

Title
Characterization of SiGe/Ge heterostructures and graded layers using variable angle spectroscopic ellipsometry [microform] / A.R. Heyd ... [et al.].
Publication
[Washington, D.C. : National Aeronautics and Space Administration ; Springfield, Va. : National Technical Information Service, distributor, 1996]

Details

Additional Authors
  • Heyd, A. R.
  • United States. National Aeronautics and Space Administration.
Description
1 v.
Series Statement
NASA-TM ; 111685
Uniform Title
NASA technical memorandum ; 111685.
Subject
  • Silicon compounds
  • Superlattices
  • Germanium compounds
  • Ellipsometry
  • Spectroscopic analysis
  • Strain measurement
  • Thickness
Note
  • Shipping list no.: 98-0791-M.
Reproduction (note)
  • Microfiche.
Call Number
READEX Microfiche NAS 1.15:111685
OCLC
marcive39647979
Title
Characterization of SiGe/Ge heterostructures and graded layers using variable angle spectroscopic ellipsometry [microform] / A.R. Heyd ... [et al.].
Imprint
[Washington, D.C. : National Aeronautics and Space Administration ; Springfield, Va. : National Technical Information Service, distributor, 1996]
Series
NASA-TM ; 111685
NASA technical memorandum ; 111685.
Reproduction
Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1997] 1 microfiche.
Added Author
Heyd, A. R.
United States. National Aeronautics and Space Administration.
Gpo Item No.
0830-D (MF)
Sudoc No.
NAS 1.15:111685
Research Call Number
READEX Microfiche NAS 1.15:111685
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