Research Catalog

Removal of oxygen from electronic materials by vapor-phase processes

Title
Removal of oxygen from electronic materials by vapor-phase processes [microform] / Witold Palosz.
Author
Palosz, Witold.
Publication
[Washington, DC : National Aeronautics and Space Administration ; Springfield, Va. : National Technical Information Service, distributor, 1997]

Details

Additional Authors
United States. National Aeronautics and Space Administration.
Description
1 v.
Series Statement
[NASA contractor report] ; NASA-CR-205248
Uniform Title
NASA contractor report ; NASA CR-205248.
Subject
  • Partial pressure
  • Thermochemistry
  • Vapor phases
  • Oxides
  • Purification
Note
  • Shipping list no.: 98-0949-M.
Reproduction (note)
  • Microfiche.
Call Number
READEX Microfiche NAS 1.26:205248
OCLC
marcive40532343
Author
Palosz, Witold.
Title
Removal of oxygen from electronic materials by vapor-phase processes [microform] / Witold Palosz.
Imprint
[Washington, DC : National Aeronautics and Space Administration ; Springfield, Va. : National Technical Information Service, distributor, 1997]
Series
[NASA contractor report] ; NASA-CR-205248
NASA contractor report ; NASA CR-205248.
Reproduction
Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1997] 1 microfiche.
Added Author
United States. National Aeronautics and Space Administration.
Gpo Item No.
0830-H-14 (MF)
Sudoc No.
NAS 1.26:205248
Research Call Number
READEX Microfiche NAS 1.26:205248
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