Research Catalog

Evaluation of a procedure for the measurement of thin film thickness by X-ray reflectivity

Title
Evaluation of a procedure for the measurement of thin film thickness by X-ray reflectivity [microform] / Jeannette Benavides.
Author
Benavides, Jeannette.
Publication
Greenbelt, Md. : National Aeronautics and Space Administration, Goddard Space Flight Center ; [Springfield, Va. : National Technical Information Service, distributor], 1997.

Details

Additional Authors
Goddard Space Flight Center.
Description
1 v.
Series Statement
NASA technical paper ; 3697
Subject
  • Thin films
  • Film thickness
  • Silicon dioxide
  • Solid state devices
  • Measuring instruments
  • X rays
  • Reflectance
  • X ray diffraction
Note
  • Shipping list no.: 99-0723-M.
Reproduction (note)
  • Microfiche.
Call Number
READEX Microfiche NAS 1.60:3697
OCLC
marcive42721731
Author
Benavides, Jeannette.
Title
Evaluation of a procedure for the measurement of thin film thickness by X-ray reflectivity [microform] / Jeannette Benavides.
Imprint
Greenbelt, Md. : National Aeronautics and Space Administration, Goddard Space Flight Center ; [Springfield, Va. : National Technical Information Service, distributor], 1997.
Series
NASA technical paper ; 3697
Reproduction
Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1998] 1 microfiche .
Added Author
Goddard Space Flight Center.
Gpo Item No.
0830-H-15 (MF)
Sudoc No.
NAS 1.60:3697
Research Call Number
READEX Microfiche NAS 1.60:3697
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