Research Catalog

Atmospheric pressure method and apparatus for removal of organic matter with atomic and ionic oxygen

Title
Atmospheric pressure method and apparatus for removal of organic matter with atomic and ionic oxygen [microform] / Bruce A. Banks, Sharon K. Rutledge.
Author
Banks, Bruce A.
Publication
[Washington, DC : National Aeronautics and Space Administration ; Springfield, Va. : National Technical Information Service, distributor, 1996]

Details

Additional Authors
  • Rutledge, Sharon K.
  • United States. National Aeronautics and Space Administration.
Description
1 v.
Series Statement
NASA case ; no. LEW-20,002-1
Uniform Title
NASA case ; LEW-20002-1.
Subject
  • Organic materials
  • Atmospheric pressure
  • Oxygen atoms
  • Substrates
  • Etching
  • Cleaning
  • Gas streams
Note
  • Shipping list no.: 98-0799-M.
Reproduction (note)
  • Microfiche.
Call Number
READEX Microfiche NAS 1.71:LEW-20002-1
OCLC
marcive42800458
Author
Banks, Bruce A.
Title
Atmospheric pressure method and apparatus for removal of organic matter with atomic and ionic oxygen [microform] / Bruce A. Banks, Sharon K. Rutledge.
Imprint
[Washington, DC : National Aeronautics and Space Administration ; Springfield, Va. : National Technical Information Service, distributor, 1996]
Series
NASA case ; no. LEW-20,002-1
NASA case ; LEW-20002-1.
Reproduction
Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1997] 1 microfiche.
Added Author
Rutledge, Sharon K.
United States. National Aeronautics and Space Administration.
Gpo Item No.
0830-J-10 (MF)
Sudoc No.
NAS 1.71:LEW-20002-1
Research Call Number
READEX Microfiche NAS 1.71:LEW-20002-1
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