- Additional Authors
- United States. National Aeronautics and Space Administration.
- Description
- 1 v.
- Series Statement
- NASA-TM ; 112474
- Uniform Title
- NASA technical memorandum ; 112474.
- Alternative Title
- Site competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers
- Subject
- Note
- Shipping list no.: 99-0055-M.
- Reproduction (note)
- Call Number
- READEX Microfiche NAS 1.15:112474
- OCLC
- marcive42818058
- Author
Larkin, D. J.
- Title
Site-competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers [microform] / D.J. Larkin.
- Imprint
[Washington, DC : National Aeronautics and Space Administration ; Springfield, Va. : National Technical Information Service, distributor, 1995]
- Series
NASA-TM ; 112474
NASA technical memorandum ; 112474.
- Reproduction
Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1997] 1 microfiche.
- Added Author
United States. National Aeronautics and Space Administration.
- Gpo Item No.
0830-D (MF)
- Sudoc No.
NAS 1.15:112474
- Research Call Number
READEX Microfiche NAS 1.15:112474