Research Catalog

Site-competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers

Title
Site-competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers [microform] / D.J. Larkin.
Author
Larkin, D. J.
Publication
[Washington, DC : National Aeronautics and Space Administration ; Springfield, Va. : National Technical Information Service, distributor, 1995]

Details

Additional Authors
United States. National Aeronautics and Space Administration.
Description
1 v.
Series Statement
NASA-TM ; 112474
Uniform Title
NASA technical memorandum ; 112474.
Alternative Title
Site competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers
Subject
  • Silicon
  • Vapor deposition
  • Epitaxy
  • Additives
  • Nitrogen
Note
  • Shipping list no.: 99-0055-M.
Reproduction (note)
  • Microfiche.
Call Number
READEX Microfiche NAS 1.15:112474
OCLC
marcive42818058
Author
Larkin, D. J.
Title
Site-competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers [microform] / D.J. Larkin.
Imprint
[Washington, DC : National Aeronautics and Space Administration ; Springfield, Va. : National Technical Information Service, distributor, 1995]
Series
NASA-TM ; 112474
NASA technical memorandum ; 112474.
Reproduction
Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1997] 1 microfiche.
Added Author
United States. National Aeronautics and Space Administration.
Gpo Item No.
0830-D (MF)
Sudoc No.
NAS 1.15:112474
Research Call Number
READEX Microfiche NAS 1.15:112474
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