Research Catalog

Sputtering threshold energies of heavy ions

Title
Sputtering threshold energies of heavy ions [microform] / Maris A. Mantenieks.
Author
Mantenieks, Maris A.
Publication
[Cleveland, Ohio] : National Aeronautics and Space Administration, Glenn Research Center ; [Springfield, Va. : National Technical Information Service, distributor, 1999]

Details

Additional Authors
NASA Glenn Research Center.
Description
1 v.
Series Statement
NASA/TM ; 1999-209273
Uniform Title
NASA technical memorandum ; 209273.
Subject
  • Heavy ions
  • Threshold voltage
  • Sputtering
  • Electric potential
  • Molybdenum
  • Xenon
Note
  • Shipping list no.: 2000-0131-M.
Reproduction (note)
  • Microfiche.
Call Number
READEX Microfiche NAS 1.15:209273
OCLC
marcive42991514
Author
Mantenieks, Maris A.
Title
Sputtering threshold energies of heavy ions [microform] / Maris A. Mantenieks.
Imprint
[Cleveland, Ohio] : National Aeronautics and Space Administration, Glenn Research Center ; [Springfield, Va. : National Technical Information Service, distributor, 1999]
Series
NASA/TM ; 1999-209273
NASA technical memorandum ; 209273.
Reproduction
Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1999] 1 microfiche.
Added Author
NASA Glenn Research Center.
Gpo Item No.
0830-D (MF)
Sudoc No.
NAS 1.15:209273
Research Call Number
READEX Microfiche NAS 1.15:209273
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