Research Catalog

Characterization of high Ge content SiGe heterostructures and graded alloy layers using spectroscopic ellipsometry

Title: Characterization of high Ge content SiGe heterostructures and graded alloy layers using spectroscopic ellipsometry [microform] / A.R. Heyd, S.A. Alterovitz, E.T. Croke.
Author: Heyd, A. R.
Publication: [Washington, D.C. : National Aeronautics and Space Administration ; Springfield, Va. : National Technical Information Service, distributor, 1995]

Details

Additional Authors

Description

1 v.

Series Statement

NASA-TM ; 112114

Uniform Title

NASA technical memorandum ; 112114.

Subject

Note

Shipping list no.: 97-0960-M.

Reproduction (note)

Microfiche.

Call Number

READEX Microfiche NAS 1.15:112114

OCLC

marcive43060392

Author

Heyd, A. R.

Title

Characterization of high Ge content SiGe heterostructures and graded alloy layers using spectroscopic ellipsometry [microform] / A.R. Heyd, S.A. Alterovitz, E.T. Croke.

Imprint

[Washington, D.C. : National Aeronautics and Space Administration ; Springfield, Va. : National Technical Information Service, distributor, 1995]

Series

NASA-TM ; 112114

NASA technical memorandum ; 112114.

Reproduction

Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1995] 1 microfiche.

Added Author

Alterovitz, S. A.

Croke, E. T.

United States. National Aeronautics and Space Administration.

Gpo Item No.

0830-D (MF)

Sudoc No.

NAS 1.15:112114

Research Call Number

READEX Microfiche NAS 1.15:112114

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