Research Catalog

Handbook of thin-film deposition processes and techniques : principles, methods, equipment and applications

Title
Handbook of thin-film deposition processes and techniques : principles, methods, equipment and applications / edited by Krishna Seshan.
Publication
Norwich, N.Y. : Noyes Publications/William Andrew Pub., c2002.

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Details

Additional Authors
Seshan, Krishna.
Description
xxviii, 629 p. : ill.; 24 cm.
Series Statement
Materials science and process technology series
Uniform Title
Materials science and process technology series.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
Call Number
JSE 02-322
ISBN
0815514425
LCCN
99088400
OCLC
vendor
Title
Handbook of thin-film deposition processes and techniques : principles, methods, equipment and applications / edited by Krishna Seshan.
Imprint
Norwich, N.Y. : Noyes Publications/William Andrew Pub., c2002.
Edition
2nd ed.
Series
Materials science and process technology series
Materials science and process technology series.
Bibliography
Includes bibliographical references and index.
Added Author
Seshan, Krishna.
Research Call Number
JSE 02-322
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