Research Catalog
Handbook of thin-film deposition processes and techniques : principles, methods, equipment and applications
- Title
- Handbook of thin-film deposition processes and techniques : principles, methods, equipment and applications / edited by Krishna Seshan.
- Publication
- Norwich, N.Y. : Noyes Publications/William Andrew Pub., c2002.
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Status | Format | Access | Call Number | Item Location |
---|---|---|---|---|
Text | Request in advance | JSE 02-322 | Offsite |
Details
- Additional Authors
- Seshan, Krishna.
- Description
- xxviii, 629 p. : ill.; 24 cm.
- Series Statement
- Materials science and process technology series
- Uniform Title
- Materials science and process technology series.
- Subjects
- Bibliography (note)
- Includes bibliographical references and index.
- Call Number
- JSE 02-322
- ISBN
- 0815514425
- LCCN
- 99088400
- OCLC
- vendor
- Title
- Handbook of thin-film deposition processes and techniques : principles, methods, equipment and applications / edited by Krishna Seshan.
- Imprint
- Norwich, N.Y. : Noyes Publications/William Andrew Pub., c2002.
- Edition
- 2nd ed.
- Series
- Materials science and process technology seriesMaterials science and process technology series.
- Bibliography
- Includes bibliographical references and index.
- Added Author
- Seshan, Krishna.
- Research Call Number
- JSE 02-322