Research Catalog

SiC processing technology for fabricating MOSFET devices and micromachined condenser microphones

Title: SiC processing technology for fabricating MOSFET devices and micromachined condenser microphones / Stephan Berberich.
Author: Berberich, Stephan.
Publication: Aachen : Shaker, 2000.

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Description

xviii, 152 p. : ill.; 21 cm.

Series Statement

Berichte aus der Halbleitertechnik

Subjects

Thesis (note)

Bibliography (note)

Call Number

JSC 03-51

ISBN

382657253X (pbk.)

OCLC

46380152

Author

Berberich, Stephan.

Title

SiC processing technology for fabricating MOSFET devices and micromachined condenser microphones / Stephan Berberich.

Imprint

Aachen : Shaker, 2000.

Series

Berichte aus der Halbleitertechnik

Thesis

Thesis (Ph. D.)--Technische Universität, Darmstadt, 2000.

Bibliography

Includes bibliographical references.

Research Call Number

JSC 03-51