Research Catalog
SEMICON/East 1986 technical programs proceedings : September 16-18, Bayside Exposition Center, Boston, Massachusetts : "Reduced thermal budget processing"
- Title
- SEMICON/East 1986 technical programs proceedings : September 16-18, Bayside Exposition Center, Boston, Massachusetts : "Reduced thermal budget processing" / presented by Semiconductor Equipment and Materials Institute, Inc.
- Author
- SEMICON/East (1986 : Boston, Mass.)
- Publication
- Mountain View, Calif. : SEMI, [1986?]
Items in the Library & Off-site
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| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | JSF 09-269 | Offsite |
Details
- Additional Authors
- Semiconductor Equipment and Materials Institute.
- Description
- x, 161 p. : ill.; 28 cm.
- Alternative Title
- Semicon East 1986
- Reduced thermal budget processing
- Subjects
- Bibliography (note)
- Includes bibliographical references.
- Call Number
- JSF 09-269
- OCLC
- 35472039
- Conference
- SEMICON/East (1986 : Boston, Mass.)
- Title
- SEMICON/East 1986 technical programs proceedings : September 16-18, Bayside Exposition Center, Boston, Massachusetts : "Reduced thermal budget processing" / presented by Semiconductor Equipment and Materials Institute, Inc.
- Imprint
- Mountain View, Calif. : SEMI, [1986?]
- Bibliography
- Includes bibliographical references.
- Added Author
- Semiconductor Equipment and Materials Institute.
- Research Call Number
- JSF 09-269