Research Catalog

Micromachines as tools for nanotechnology

Title
Micromachines as tools for nanotechnology / H. Fujita (ed.).
Publication
Berlin ; New York : Springer, 2003.

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Details

Additional Authors
Fujita, Hiroyuki, 1952-
Description
xii, 211 : ill.; 24 cm.
Series Statement
Microtechnology and MEMS
Subjects
Bibliography (note)
  • Includes bibliographical references.
Call Number
JSE 04-206
ISBN
354000856X (alk. paper)
LCCN
2003045497
OCLC
51861936
Title
Micromachines as tools for nanotechnology / H. Fujita (ed.).
Imprint
Berlin ; New York : Springer, 2003.
Series
Microtechnology and MEMS
Bibliography
Includes bibliographical references.
Added Author
Fujita, Hiroyuki, 1952-
Research Call Number
JSE 04-206
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