Research Catalog

Title

SEM Sentinel [microform] : SEM performance measurement system / Alice V. Ling ... [et al.].

Publication

Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, [2000-

Details

Additional Authors

• Ling, Alice V. (Alice Valeria)
• National Institute of Standards and Technology (U.S.)

Description

v. : ill.; 28 cm.

Series Statement

NISTIR

Alternative Title

• Scanning electron microscope Sentinel
• SEM performance measurement system
• Scanning electron microscope performance measurement system

Subject

• Scanning electron microscopes
• Semiconductor wafers > Measurement

Note

• "April 2000"--Pt. 1.
• Shipping list no.: 2000-0860-M (Pt. 1)

Bibliography (note)

• Includes bibliographical references.

Numbering (note)

• Issued in parts.

Reproduction (note)

• Microfiche.

Call Number

GPO Microfiche C 13.58

OCLC

marcive44881135

Title

SEM Sentinel [microform] : SEM performance measurement system / Alice V. Ling ... [et al.].

Imprint

Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, [2000-

Series

NISTIR

Bibliography

Includes bibliographical references.

Numbering

Issued in parts.

Reproduction

Microfiche. [Washington, D.C.] : Supt. of Docs., U.S. G.P.O., [2000- microfiches : negative.

Added Author

Ling, Alice V. (Alice Valeria)

National Institute of Standards and Technology (U.S.)

Gpo Item No.

0247-D (MF)

Sudoc No.

C 13.58:

Research Call Number

GPO Microfiche C 13.58: