- Additional Authors
- Description
- 1 v. (various pagings) : ill.; 28 cm.
- Summary
- Presentation materials from the satellite workshop held at NIST, September 19, 2000 in collaboration with the 8th International Conference on Advanced Thermal Processing of Semiconductors-- RTP'2000 outlining how to use thermocouples for measurements of temperature in semiconductor processing and how to achieve the highest accuracy.
- Series Statement
- NISTIR ; 6566
- Subject
- Note
- "January 5, 2001."
- Shipping list no.: 2003-0523-M.
- Bibliography (note)
- Includes bibliographical references.
- Reproduction (note)
- Call Number
- GPO Microfiche C 13.58:6566
- OCLC
- marcive50905930
- Conference
Workshop on Temperature Measurement of Semiconductor Wafers Using Thermocouples (2000 : NIST)
- Title
Workshop on temperature measurement of semiconductor wafers using thermocouples [microform] / K.G. Kreider ... [et al., editors].
- Imprint
Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, [2001]
- Series
NISTIR ; 6566
- Bibliography
Includes bibliographical references.
- Reproduction
Microfiche. [Washington, D.C.] : Supt. of Docs., U.S. G.P.O., 2002. 2 microfiches : negative.
- Added Author
Kreider, Kenneth G.
National Institute of Standards and Technology (U.S.)
- Gpo Item No.
0247-D (MF)
- Sudoc No.
C 13.58:6566
- Research Call Number
GPO Microfiche C 13.58:6566