Research Catalog
The physics and chemistry of SiO₂ and the Si-SiO₂ interface 2
- Title
- The physics and chemistry of SiO₂ and the Si-SiO₂ interface 2 / edited by C. Robert Helms and Bruce E. Deal.
- Publication
- New York : Plenum Press, c1993.
Items in the Library & Off-site
Filter by
1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | JSF 94-451 | Offsite |
Details
- Additional Authors
- Description
- xvi, 503 p. : ill.; 26 cm.
- Alternative Title
- SiO₂ and the Si-SiO₂ interface 2
- Subject
- Note
- Proceedings of the Second Symposium on the Physics and Chemistry of the SiO₂ and Si-SiO₂ Interface, held May 18-21, 1992, in St. Louis, Missouri, sponsored by the Electronics Division and the Dielectric Science and Technology Division of the Electrochemical Society.
- Bibliography (note)
- Includes bibliographical references and indexes.
- Call Number
- JSF 94-451
- ISBN
- 0306444194
- LCCN
- 93014058
- OCLC
- 28218251
- Title
- The physics and chemistry of SiO₂ and the Si-SiO₂ interface 2 / edited by C. Robert Helms and Bruce E. Deal.
- Imprint
- New York : Plenum Press, c1993.
- Bibliography
- Includes bibliographical references and indexes.
- Indexed Term
- Silicon compounds
- Added Author
- Helms, C. Robert.Deal, Bruce E.Electrochemical Society. Electronics Division.Electrochemical Society. Dielectric Science and Technology Division.Symposium on the Physics and Chemistry of the SiO₂ and Si-SiO₂ Interface (2nd : 1992 : Saint Louis, Mo.)
- Research Call Number
- JSF 94-451