Research Catalog

Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, USA

Title
Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, USA / editors, Thomas O. Sedgwick, Thomas E. Seidel, Bor-Yeu Tsaur.
Publication
Pittsburgh, Pa. : Materials, Research Society, c1986.

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Details

Additional Authors
  • Sedgwick, Thomas O.
  • Seidel, Thomas E.
  • Tsaur, Bor-Yeu.
Description
xiv, 484 p. : ill.; 24 cm.
Series Statement
Materials Research Society symposia proceedings, 0272-9172 ; v. 52
Subject
  • Semiconductors > Heat treatment > Congresses
  • Semiconductor doping > Congresses
Bibliography (note)
  • Includes bibliographies and index.
Call Number
JSE 87-257
ISBN
0931837170
LCCN
86005265
OCLC
  • 13329804
  • NYPG87-B2446
Title
Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, USA / editors, Thomas O. Sedgwick, Thomas E. Seidel, Bor-Yeu Tsaur.
Imprint
Pittsburgh, Pa. : Materials, Research Society, c1986.
Series
Materials Research Society symposia proceedings, 0272-9172 ; v. 52
Bibliography
Includes bibliographies and index.
Added Author
Sedgwick, Thomas O.
Seidel, Thomas E.
Tsaur, Bor-Yeu.
Research Call Number
JSE 87-257
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