Research Catalog

Ion beam assisted film growth

Title
Ion beam assisted film growth / edited by Tadatsugu Itoh.
Publication
Amsterdam ; New York : Elsevier, 1989.

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Details

Additional Authors
Itoh, Tadatsugu.
Description
xvii, 439 p. : ill.; 25 cm.
Series Statement
Beam modification of materials ; 3
Subject
  • Thin films, Multilayered
  • Ion bombardment
  • Sputtering (Physics)
  • Semiconductor films
Bibliography (note)
  • Includes bibliographies and indexes.
Call Number
JSE 89-1432
ISBN
0444872809 (U.S.)
LCCN
88038872
OCLC
  • 18834466
  • NYPG90-B6571
Title
Ion beam assisted film growth / edited by Tadatsugu Itoh.
Imprint
Amsterdam ; New York : Elsevier, 1989.
Series
Beam modification of materials ; 3
Bibliography
Includes bibliographies and indexes.
Added Author
Itoh, Tadatsugu.
Research Call Number
JSE 89-1432
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