Research Catalog

Silicide technology for integrated circuits

Title
Silicide technology for integrated circuits / edited by Lih J. Chen.
Publication
London : Institution of Electrical Engineers, c2004.

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Details

Additional Authors
  • Chen, L. J.
  • Institution of Electrical Engineers.
Description
xviii, 279 p. : ill.; 26 cm.
Series Statement
IEE processing series ; 5
Subject
  • Silicides
  • Integrated circuits > Materials
Bibliography (note)
  • Includes bibliographical references and index.
Call Number
JSF 05-424
ISBN
0863413528 (hbk.)
OCLC
  • 56760285
  • vendorOCM56760285
Title
Silicide technology for integrated circuits / edited by Lih J. Chen.
Imprint
London : Institution of Electrical Engineers, c2004.
Series
IEE processing series ; 5
Bibliography
Includes bibliographical references and index.
Added Author
Chen, L. J.
Institution of Electrical Engineers.
Research Call Number
JSF 05-424
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