Research Catalog
ULSI process integration III : proceedings of the international symposium
- Title
- ULSI process integration III : proceedings of the international symposium / editors, C.L. Claeys ... [et al.] ; sponsoring division, Electronics.
- Author
- International Symposium on ULSI Process Integration (3rd : 2003 : Paris, France)
- Publication
- Pennington, NJ : Electrochemical Society, c2003.
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| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | JSE 05-897 | Offsite |
Details
- Additional Authors
- Description
- xvii, 598 p. : ill.; 24 cm.
- Series Statement
- Proceedings ; v. 2003-06
- Uniform Title
- Proceedings (Electrochemical Society) ; v. 2003-06.
- Alternative Title
- ULSI process integration three
- Subject
- Note
- "Includes papers that were presented at the Third Symposium on ULSI Process Integration held in Paris, France at the 203rd Meeting of the Electrochemical Society, April 28-May 2, 2003"--Pref.
- Bibliography (note)
- Includes bibliographical references and indexes.
- Call Number
- JSE 05-897
- ISBN
- 1566773768
- LCCN
- 2003100866
- OCLC
- 52725221
- Conference
- International Symposium on ULSI Process Integration (3rd : 2003 : Paris, France)
- Title
- ULSI process integration III : proceedings of the international symposium / editors, C.L. Claeys ... [et al.] ; sponsoring division, Electronics.
- Imprint
- Pennington, NJ : Electrochemical Society, c2003.
- Series
- Proceedings ; v. 2003-06Proceedings (Electrochemical Society) ; v. 2003-06.
- Bibliography
- Includes bibliographical references and indexes.
- Added Author
- Claeys, Cor L.Electrochemical Society. Electronics Division.Electrochemical Society. Meeting (203rd : 2003 : Paris, France)
- Research Call Number
- JSE 05-897