Research Catalog
ULSI process integration IV : proceedings of the international symposium
- Title
- ULSI process integration IV : proceedings of the international symposium / editors, C.L. Claeys ... [et al.] ; sponsoring division, Electronics.
- Author
- International Symposium on ULSI Process Integration (4th : 2005 : Quebec, Quebec)
- Publication
- Pennington, NJ : Electrochemical Society, c2005.
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| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | JSE 05-1036 | Offsite |
Details
- Additional Authors
- Description
- xiii, 434 p. : ill.; 24 cm.
- Series Statement
- Proceedings, 0161-6374 ; v. 2005-06.
- Uniform Title
- Proceedings (Electrochemical Society) ; v. 2005-06.
- Subject
- Note
- " ... includes papers that were presented at the Fourth Symposium on ULSI Process Integration held in Quebec, Canada at the 207th Meeting of the Electrochemical Society, May 16-20, 2005."--P. v.
- Call Number
- JSE-05-1036
- ISBN
- 1566774640
- LCCN
- 2005922166
- OCLC
- 61666603
- Conference
- International Symposium on ULSI Process Integration (4th : 2005 : Quebec, Quebec)
- Title
- ULSI process integration IV : proceedings of the international symposium / editors, C.L. Claeys ... [et al.] ; sponsoring division, Electronics.
- Imprint
- Pennington, NJ : Electrochemical Society, c2005.
- Series
- Proceedings, 0161-6374 ; v. 2005-06.Proceedings (Electrochemical Society) ; v. 2005-06.
- Added Author
- Claeys, Cor L.Electrochemical Society.Electrochemical Society. Electronics Division.Electrochemical Society. Meeting (207th : 2005 : Quebec, Quebec)
- Research Call Number
- JSE-05-1036