Research Catalog

Influence of the deposition conditions on radiofrequency magnetron sputtered MoS2 films

Title
Influence of the deposition conditions on radiofrequency magnetron sputtered MoS2 films [microform] / Pierre A. Steinmann and Talivaldis Spalvins.
Author
Steinmann, Pierre A.
Publication
[Washington, D.C.] : National Aeronautics and Space Administration, Office of Management, Scientific and Technical Information Division ; Springfield, Va. : For sale by the National Technical Information Service, 1990.

Available Online

http://purl.access.gpo.gov/GPO/LPS68087

Details

Additional Authors
  • Spalvins, Talivaldis.
  • Lewis Research Center.
  • United States. National Aeronautics and Space Administration. Scientific and Technical Information Division.
Description
7 p. : ill.; 28 cm.
Series Statement
NASA technical paper ; 2994
Subject
  • Coatings
  • Lubrication and lubricants
  • Molybdenum compounds
  • Sputtering (Physics)
  • Deposition
  • Lubricants
  • Magnetron sputtering
  • Morphology
  • Radio frequencies
  • Stoichiometry
  • Thin films
Note
  • Shipping list no.: 1990-0871-M.
  • Distributed to depository libraries in microfiche.
  • Prepared at Lewis Research Center.
  • "April 1990."
Bibliography (note)
  • Bibliography: p. 3.
Additional Formats (note)
  • Also available via Internet from the NTRS web site. Address as of 3/23/06: http://ntrs.nasa.gov/archive/nasa/casi.ntrs.nasa.gov/19900011894%5F1990011894.pdf; current access is available via PURL.
Reproduction (note)
  • Microfiche.
Call Number
GPO Microfiche NAS 1.60:2994
OCLC
marcive34351177
Author
Steinmann, Pierre A.
Title
Influence of the deposition conditions on radiofrequency magnetron sputtered MoS2 films [microform] / Pierre A. Steinmann and Talivaldis Spalvins.
Imprint
[Washington, D.C.] : National Aeronautics and Space Administration, Office of Management, Scientific and Technical Information Division ; Springfield, Va. : For sale by the National Technical Information Service, 1990.
Series
NASA technical paper ; 2994
Bibliography
Bibliography: p. 3.
Reproduction
Microfiche. [Washington, D.C. : National Aeronautics and Space Administration,] 1990. 1 microfiche.
Additional Formats
Also available via Internet from the NTRS web site. Address as of 3/23/06: http://ntrs.nasa.gov/archive/nasa/casi.ntrs.nasa.gov/19900011894%5F1990011894.pdf; current access is available via PURL.
Connect to:
http://purl.access.gpo.gov/GPO/LPS68087
Added Author
Spalvins, Talivaldis.
Lewis Research Center.
United States. National Aeronautics and Space Administration. Scientific and Technical Information Division.
Gpo Item No.
0830-H-15 (MF)
0830-H-15 (online)
Sudoc No.
NAS 1.60:2994
Research Call Number
GPO Microfiche NAS 1.60:2994
GPO Internet NAS 1.60:2994
View in Legacy Catalog